Patent · US Active

Semiconductor device and method for fabricating the same

US11575014B2 · kind B2 · utility

1Cited by
4References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 12, 2021
Grant dateFeb 7, 2023
Priority date
Expiry dateApr 13, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/038
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device is provided. The semiconductor device includes a substrate comprising an element isolation region and an active region defined by the element isolation region, a fin-type pattern on the active region, the fin-type pattern extending in a first horizontal direction, a gate electrode on the fin-type pattern, the gate electrode extending in a second horizontal direction that crosses the first horizontal direction, a capping pattern on the gate electrode, a source/drain region on at least one side of the gate electrode, a source/drain contact on the source/drain region and electrically connected to the source/drain region, and a filling insulating layer on the source/drain contact, the filling insulating layer having a top surface at a same level as a top surface of the capping pattern, and including a material containing a carbon (C) atom.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.