Patent · US Active

Method for fabricating a detection device comprising a step of direct bonding of a thin sealing layer provided with a getter material

US11575063B2 · kind B2 · utility

0Cited by
0References
13Claims
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Assignee

Inventors

Key dates

Filing dateNov 27, 2020
Grant dateFeb 7, 2023
Priority date—
Expiry dateNov 27, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10F77/60
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The invention relates to a method for fabricating a thermal detector (1), comprising the following steps:

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.