Temperature detection device
US11592342B2 · kind B2 · utility
0Cited by
2References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2020 |
| Grant date | Feb 28, 2023 |
| Priority date | — |
| Expiry date | Jan 4, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K13/026
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Disclosed is a temperature detection device. The device for detecting temperature of a processing liquid for substrate processing according to an embodiment includes a temperature measurement sensor installed adjacent to an outer surface of a tube through which the processing liquid flows, in which the temperature measurement sensor senses the temperature of the processing liquid in the tube.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.