Patent assignee · KR · COMPANY

KCTECH CO., LTD.

35Patents
35Active
35Granted
55Portfolio score

Filing activity: Jan 23, 2015 → Jan 18, 2023

Most-cited patents

PatentTitleAreaCited byStatus
US10518382B2 Substrate processing system Electricity 5 Active
US10002777B2 Substrate processing system and substrate processing method Electricity 5 Active
US11384255B2 Polishing slurry composition for STI process Electricity 2 Active
US11332641B2 Polishing slurry composition enabling implementation of multi-selectivity Electricity 2 Active
US10494547B2 Additive composition and positive polishing slurry composition including the same Electricity 1 Active
US11749549B2 Substrate processing apparatus with an air curtain in a loading/unloading part Emerging Cross-Sectional Technologies 0 Active
US10421883B2 Abrasive particle-dispersion layer composite and polishing slurry composition including the same Electricity 0 Active
US11732217B2 Cleaning solution composition and cleaning method using the same Chemistry; Metallurgy 0 Active
US11592342B2 Temperature detection device Physics 0 Active
US11311979B2 Apparatus and method for manufacturing display device Performing Operations; Transporting 0 Active
US12394627B2 Substrate polishing system Electricity 0 Active
US10138395B2 Abrasive particle-dispersion layer composite and polishing slurry composition including the same Electricity 0 Active
US12305079B2 CMP slurry composition for polishing polycrystalline silicon and polishing method using same Performing Operations; Transporting 0 Active
US11279851B2 Polishing slurry composition Electricity 0 Active
US12247141B2 Polishing slurry composition Electricity 0 Active
US11701693B2 Substrate processing device comprising door unit having inclined surface Electricity 0 Active
US11845912B2 Cleaning liquid composition and cleaning method using same Chemistry; Metallurgy 0 Active
US9994735B2 Slurry composition for polishing tungsten Chemistry; Metallurgy 0 Active
US10784113B2 Chemical mechanical polishing apparatus Performing Operations; Transporting 0 Active
US12037516B2 Polishing slurry composition and method for producing same Chemistry; Metallurgy 0 Active
US12428584B2 Cerium oxide abrasive particles and polishing slurry composition Chemistry; Metallurgy 0 Active
US11279852B2 CMP slurry compositions and methods of fabricating a semiconductor device using the same Electricity 0 Active
US12421424B2 Slurry composition and method of manufacturing integrated circuit device by using the same Electricity 0 Active
US12187919B2 Polishing slurry composition Electricity 0 Active
US11919122B2 Polishing head, substrate processing apparatus including the same and processing method of substrate using the same Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.