Patent · US Active

Positive-type photosensitive resin composition

US11592744B2 · kind B2 · utility

0Cited by
0References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 5, 2016
Grant dateFeb 28, 2023
Priority date
Expiry dateAug 5, 2036

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG03F7/40
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A positive-type photosensitive resin composition comprises a (a) polybenzoxazole precursor, a (b) crosslinking agent, a (c) photosensitive agent, and a (d) solvent, wherein the (a) polybenzoxazole precursor comprises a structure represented by Formula (1) below, and the (c) photosensitive agent is a compound comprising a structure represented by Formula (2) below. In Formula (1), U is a bivalent organic group, a single bond, —O—, or —SO2—, V is a group comprising an aliphatic structure, and the carbon number in the aliphatic structure is 1 to 30.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.