Debris-free laser ablation processing assisted by condensed frost layer

US11597035B2 · kind B2 · utility

Assignee

• Shanghai Institute of Optics And Fine Mechanics, Chinese Academy of Sciences · CN

Inventors

• Yang Liao · Shanghai, CN
• Yan Yue · Shanghai, CN
• Xuan Wang · Xuzhou, CN
• Junchi Chen · Shanghai, CN
• Yujie PENG · Shanghai, CN
• Yuxin Leng · Shanghai, CN

Key dates

• Filing date: Sep 18, 2020
• Grant date: Mar 7, 2023
• Expiry date: Sep 18, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N1/42
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Laser ablation processing method for debris-free and efficient removal of materials comprises the step of using a refrigeration device to condense the water vapor and form a thin frost layer on the materials at temperatures below the freezing point. The residual debris produced during the ablation process deposits on the frost layer that covers the material, which is easily removed when the frost layer melts. At the same time, the frost layer in the laser irradiation area melts to a liquid layer, which can effectively reduce the deposition of debris on the inner wall of the groove and thus improve the efficiency and quality of laser ablation. The method is applicable to debris-free laser processing on an arbitrary curved surface.