Imaging system and method for specimen detection
US11598732B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2018 |
| Grant date | Mar 7, 2023 |
| Priority date | — |
| Expiry date | Sep 25, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30004
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An imaging system includes: a micro computed tomography (micro-CT) subsystem, a specimen processing subsystem, a scanning electron microscopy (SEM) and a processor. The micro-CT subsystem includes an X-ray source and an X-ray detector, and is configured to acquire a three-dimensional image of a specimen. The specimen processing subsystem includes a focused ion beam subsystem and a mechanical cutting device. The focused ion beam subsystem is configured to process the specimen in a first processing manner, and the mechanical cutting device is configured to process the specimen in a second processing manner to obtain a target section of a target area. The SEM is located above the specimen and is configured to acquire a two-dimensional image of the target section. The processor is configured to perform three-dimensional reconstruction on the two-dimensional images to obtain a three-dimensional imaging of the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.