Pulsing control match network
US11605527B2 · kind B2 · utility
2Cited by
144References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2021 |
| Grant date | Mar 14, 2023 |
| Priority date | — |
| Expiry date | Apr 25, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24564
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of controlling a radio frequency processing system, the method including determining an end time of a radio frequency pulse; stopping a load applied to the radio frequency processing system based on the end time of the radio frequency pulse; adjusting an additional load having a predetermined impedance applied to the radio frequency processing system in response to the determined end time; determining a start point of a second radio frequency pulse; and stopping the additional load before the second radio frequency pulse occurs.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.