Ferroelectric resonator

US11605624B2 · kind B2 · utility

Assignee

• Intel Corporation · US

Inventors

• Tanay Gosavi · Portland, US
• Chia-Ching Lin · Daxi District, TW
• Raseong Kim · Hillsboro, US
• Ashish Verma Penumatcha · Hillsboro, US
• Uygar E. Avci · Portland, US
• Ian A. Young · Portland, US

Key dates

• Filing date: Jan 2, 2019
• Grant date: Mar 14, 2023
• Expiry date: Jul 13, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/716

Abstract

Describe is a resonator that uses ferroelectric (FE) material in a capacitive structure. The resonator includes a first plurality of metal lines extending in a first direction; an array of capacitors comprising ferroelectric material; a second plurality of metal lines extending in the first direction, wherein the array of capacitors is coupled between the first and second plurality of metal lines; and a circuitry to switch polarization of at least one capacitor of the array of capacitors. The switching of polarization regenerates acoustic waves. In some embodiments, the acoustic mode of the resonator is isolated using phononic gratings all around the resonator using metal lines above and adjacent to the FE based capacitors.