Patent · US Active

Metal gate cap

US11605720B2 · kind B2 · utility

1Cited by
9References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 26, 2021
Grant dateMar 14, 2023
Priority date
Expiry dateMay 10, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/364
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

The present disclosure provides a semiconductor device and a method of forming the same. The semiconductor device includes a first channel members being vertically stacked, a second channel members being vertically stacked, an n-type work function layer wrapping around each of the first channel members, a first p-type work function layer over the n-type work function layer and wrapping around each of the first channel members, a second p-type work function layer wrapping around each of the second channel members, a third p-type work function layer over the second p-type work function layer and wrapping around each of the second channel members, and a gate cap layer over a top surface of the first p-type work function layer and a top surface of the third p-type work function layer such that the gate cap layer electrically couples the first p-type work function layer and the third p-type work function layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.