Anomalous equipment trace detection and classification
US11609812B2 · kind B2 · utility
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9Claims
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Key dates
| Filing date | Oct 6, 2020 |
| Grant date | Mar 21, 2023 |
| Priority date | — |
| Expiry date | May 27, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06N7/01
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
Scheme for detection and classification of semiconductor equipment faults. Sensor traces are monitored and processed to separate known abnormal operating conditions from unknown abnormal operating conditions. Feature engineering permits focus on relevant traces for a targeted feature. A machine learning model is built to detect and classify based on an initial classification set of anomalies. The machine learning model is continuously updated as more traces are processed and learned.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.