Patent · US Active

Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor

US11611835B2 · kind B2 · utility

0Cited by

9References

7Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Christian Bretthauer · Munich, DE
Pradyumna Mishra · San Jose, US
Daniel Neumaier · Feldkirchen in Kärnten, AT
David Tumpold · Tauberbischofsheim, DE

Key dates

Filing date	Jun 9, 2020
Grant date	Mar 21, 2023
Priority date	—
Expiry date	Jun 5, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2410/03
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A MicroElectroMechanical Structure (MEMS) accelerometer includes a piezoelectric membrane including at least one electrode and an inertial mass, the piezoelectric membrane being affixed to a holder; and a circuit for evaluating sums and differences of signals associated with the at least one electrode to determine a three-dimensional acceleration direction, wherein the at least one electrode includes a segmented electrode, and wherein the segmented electrode includes four segmentation zones.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.