Electron optical system and multi-beam image acquiring apparatus
US11621144B2 · kind B2 · utility
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7Claims
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Key dates
| Filing date | Jul 30, 2019 |
| Grant date | Apr 4, 2023 |
| Priority date | — |
| Expiry date | Jul 30, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/24592
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An electron optical system includes an electromagnetic lens configured to include a yoke, and refract an electron beam passing through the yoke by generating a magnetic field, and a shield coil disposed along the inner wall of the yoke, and configured to reduce a leakage magnetic field generated by the electromagnetic lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.