Patent · US Active

Multi-blade robot apparatus, electronic device manufacturing apparatus, and methods adapted to transport multiple substrates in electronic device manufacturing

US11621182B2 · kind B2 · utility

0Cited by

7References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Devendra Channappa Holeyannavar · Bengaluru, IN
Sandesh Doddamane Ramappa · Kanchinakote, IN
Dean C. Hruzek · Cedar Park, US
Michael R. Rice · Pleasanton, US
Jeffrey A. Brodine · Los Gatos, US

Key dates

Filing date	Oct 26, 2020
Grant date	Apr 4, 2023
Priority date	—
Expiry date	Oct 26, 2040

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67207
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

An equipment front end module (EFEM) includes sidewalls forming an EFEM chamber configured to receive inert gas from an inert gas supply. The sidewalls include a first sidewall configured to attach to a panel first side of a panel. The panel forms a panel opening extending between the panel first side and a panel second side. The panel second side is configured to attach to a side storage pod. The EFEM further includes a robot disposed in the EFEM chamber. The robot is configured to transfer substrates from the EFEM chamber into the side storage pod via the panel opening. An exhaust conduit is coupled to the side storage pod to exhaust gas from the side storage pod to an exterior of the side storage pod.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.