Apparatus and method for in-situ calibration of a photoacoustic sensor

US11630087B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Stefan Kolb · Unterschleißheim, DE
• Alfons Dehe · Reutlingen, DE
• Jochen Huber · Wolfach, DE
• Franz Jost · Stuttgart, DE
• Horst Theuss · Wenzenbach, DE
• Juergen Woellenstein · Glückstadt, DE

Key dates

• Filing date: Feb 3, 2022
• Grant date: Apr 18, 2023
• Expiry date: Feb 3, 2042

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2291/021
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus for in-situ calibration of a photoacoustic sensor includes a measurement device configured to measure an electric signal at an IR emitter of the photoacoustic sensor, wherein the IR emitter generates an electromagnetic spectrum based on the electric signal; and a calibration unit including processing circuitry, configured to compare the electric signal with a comparison value to generate a comparison result used as calibration information. When performing the in-situ calibration, the calibration unit is configured to adjust the electric signal based on the calibration information, or the calibration unit is configured to process an output signal of the photoacoustic sensor based on the calibration information to obtain an adjusted output signal of the photoacoustic sensor.