Electrostatic discharge protection devices and methods for fabricating electrostatic discharge protection devices

US11631759B2 · kind B2 · utility

Assignee

• GLOBALFOUNDRIES U.S. Inc. · US

Inventors

• Meng Miao · Williston, US
• Alain Loiseau · Williston, US
• Souvick Mitra · South Burlington, US
• Robert J. Gauthier, Jr. · South Burlington, US
• You Li · South Burlington, US
• Wei Liang · South Burlington, US

Key dates

• Filing date: Feb 2, 2021
• Grant date: Apr 18, 2023
• Expiry date: May 20, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D89/713

Abstract

An ESD protection device may be provided, including: a substrate including a first conductivity region and a second conductivity region arranged therein. The first conductivity region may include a first terminal region and a second terminal region electrically coupled with each other. The second conductivity region may include a third terminal region and a fourth terminal region electrically coupled with each other. The second conductivity region may further include a fifth terminal region electrically coupled with the first and second terminal regions. The fifth terminal region may be arranged laterally between the third terminal region and the fourth terminal region. The first conductivity region, the first terminal region, the third terminal region, and the fifth terminal region may have a first conductivity type. The second conductivity region, the second terminal region, and the fourth terminal region may have a second conductivity type different from the first conductivity type.