Detecting device and detecting method thereof, and detecting apparatus
US11635646B2 · kind B2 · utility
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2References
14Claims
0Family size
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Key dates
| Filing date | Jan 14, 2019 |
| Grant date | Apr 25, 2023 |
| Priority date | — |
| Expiry date | Aug 9, 2040 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/9513
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A detecting device and a detecting method thereof and a detecting apparatus are provided. The detecting device includes a stage, a light detection unit and a first, light, source, the stage includes a bearing surface for bearing an object to be detected, the light detection unit is located on a side of the stage, the first light source is located on a side of the stage that is opposite to the light detection unit, and light emitted from the, first light source is at least partially emitted to the light detection unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.