Multi-stage, multi-zone substrate positioning systems

US11637030B2 · kind B2 · utility

Assignee

• KLA Corporation · US

Inventors

• Yoram Uziel · Yodfat, IL
• Ulrich Pohlmann · Jena, DE
• Frank Laske · Weilmünster, DE
• Nadav Gutman · Zichron Ya'akov, IL
• Ariel Hildesheim · Kiryat Tivon, IL
• Aviv Balan · Mountain View, US

Key dates

• Filing date: Jun 12, 2020
• Grant date: Apr 25, 2023
• Expiry date: May 14, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J2237/20221
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

A first x-y translation stage, a second x-y translation stage, and a chuck are disposed in a chamber. The chuck is situated above and coupled to the second x-y translation stage, which is situated above and coupled to the first x-y translation stage. The chuck is configured to support a substrate and to be translated by the first and second x-y stages in x- and y-directions, which are substantially parallel to a surface of the chuck on which the substrate is to be mounted. A first barrier and a second barrier are also disposed in the chamber. The first barrier is coupled to the first x-y translation stage to separate a first zone of the chamber from a second zone of the chamber. The second barrier is coupled to the second x-y translation stage to separate the first zone of the chamber from a third zone of the chamber.