Patent · US Active

Electrically isolated gate contact in FINFET technology for camouflaging integrated circuits from reverse engineering

US11637076B2 · kind B2 · utility

0Cited by
1References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 25, 2021
Grant dateApr 25, 2023
Priority date
Expiry dateFeb 1, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/519
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A system and method for adding a source contact, a drain contact, and an apparent gate contact to a FinFET having a fin including a source region, a drain region, and a gate disposed over the fin forming one or more transistor junctions with the fin. The method comprises producing a source contact opening extending downward to a first region electrically coupled to the source region, a drain contact opening extending downward to a second region electrically coupled to the drain region, and a gate contact opening extending downward to a third region electrically isolated from the gate, and filling the source contact opening, the drain contact opening, and the gate contact opening with a conductive metal.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.