Method and apparatus for Schottky TFE inspection
US11640896B2 · kind B2 · utility
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10Claims
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Key dates
| Filing date | May 13, 2021 |
| Grant date | May 2, 2023 |
| Priority date | — |
| Expiry date | May 13, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/282
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure is related to a Schottky thermal field (TFE) source for emitting an electron beam. Electron optics can adjust a shape of the electron beam before the electron beam impacts a scintillator screen. Thereafter, the scintillator screen generates an emission image in the form of light. An emission image can be adjusted and captured by a camera sensor in a camera at a desired magnification to create a final image of the Schottky TFE source's tip. The final image can be displayed and analyzed to for defects.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.