Victor Katsap
27Patents
5h-index
15Co-inventors
66Inventor score
Filing activity: May 6, 1999 → Aug 28, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6333508A | Illumination system for electron beam lithography tool | Electricity | 52 | Expired |
| US7176610B2 | High brightness thermionic cathode | Electricity | 11 | Expired |
| US6232040A | Method of electron beam exposure utilizing emitter with conductive mesh grid | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6400090B2 | Electron emitters for lithography tools | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6528799B1 | Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems | Emerging Cross-Sectional Technologies | 7 | Expired |
| US9165737B2 | High-brightness, long life thermionic cathode and methods of its fabrication | Electricity | 5 | Active |
| US6440620B1 | Electron beam lithography focusing through spherical aberration introduction | Emerging Cross-Sectional Technologies | 4 | Expired |
| US9790620B1 | Method of reducing work function in carbon coated LaB6 cathodes | Electricity | 4 | Active |
| US7345290B2 | Lens array for electron beam lithography tool | Electricity | 4 | Expired |
| US10573481B1 | Electron guns for electron beam tools | Electricity | 3 | Active |
| US6448569B1 | Bonded article having improved crystalline structure and work function uniformity and method for making the same | Electricity | 2 | Expired |
| US6420714B1 | Electron beam imaging apparatus | Electricity | 2 | Expired |
| US6492647B1 | Electron guns for lithography tools | Electricity | 2 | Expired |
| US10593505B1 | Low temperature, high-brightness, cathode | Electricity | 1 | Active |
| US11640896B2 | Method and apparatus for Schottky TFE inspection | Electricity | 0 | Active |
| US11615938B2 | High-resolution multiple beam source | Electricity | 0 | Active |
| US6620565B2 | Electron beam lithography apparatus focused through spherical aberration introduction | Emerging Cross-Sectional Technologies | 0 | Expired |
| US11823862B2 | Method and apparatus for usable beam current and brightness in Schottky thermal field emission (TFE) | Electricity | 0 | Active |
| US11901154B1 | Conical heat shield for electron emitting cathode | Electricity | 0 | Active |
| US11699564B2 | Schottky thermal field emitter with integrated beam splitter | Electricity | 0 | Active |
| US6815876B1 | Cathode with improved work function and method for making the same | Electricity | 0 | Expired |
| US10553388B1 | High-brightness lanthanum hexaboride cathode and method for manufacturing of cathode | Electricity | 0 | Active |
| US12165834B2 | Method and apparatus for Schottky TFE inspection | Electricity | 0 | Active |
| US11562879B2 | Low-blur electrostatic transfer lens for multi-beam electron gun | Electricity | 0 | Active |
| US12131883B2 | Method and apparatus for usable beam current and brightness in Schottky thermal field emission (TFE) | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.