Patent · US Active

Method for detector equalization during the imaging of objects with a multi-beam particle microscope

US11645740B2 · kind B2 · utility

0Cited by

88References

21Claims

0Family size

Assignee

Carl Zeiss MultiSEM GmbH · DE

Inventors

Dirk Zeidler · Oberkochen, DE
Michael Behnke · Mendota, US
Stefan Schubert · Oberkochen, DE
Christof Riedesel · Oberkochen, DE

Key dates

Filing date	Mar 4, 2021
Grant date	May 9, 2023
Priority date	—
Expiry date	Mar 4, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2811
WIPO fieldComputer technology
WIPO sectorElectrical engineering

Abstract

A method for detector equalization during the imaging of objects with a multi-beam particle microscope includes performing an equalization on the basis of individual images in or on the basis of overlap regions. For detector equalization, contrast values and/or brightness values are used and iterative methods can be employed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.