Optical components undercut by a sealed cavity
US11650382B1 · kind B1 · utility
1Cited by
12References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 26, 2021 |
| Grant date | May 16, 2023 |
| Priority date | — |
| Expiry date | Oct 26, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12147
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Structures including an optical component, such as an edge coupler, and methods of fabricating a structure that includes an optical component, such as an edge coupler. The structure includes a substrate having a sealed cavity, an optical component, and a dielectric layer between the optical component and the sealed cavity. The optical component is positioned vertically over the substrate and the dielectric layer, and the optical component overlaps with the sealed cavity in the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.