Substrate-cleaning apparatus having tiltable roll brush
US11654458B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 27, 2020 |
| Grant date | May 23, 2023 |
| Priority date | — |
| Expiry date | Nov 25, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/04
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A substrate-cleaning apparatus may include a tilting arm to which a roll brush and a motor are coupled, a support arm positioned on the tilting arm, a first spring and a second spring coupling the tilting arm to the support arm, a first air bag and a second air bag mounted between the tilting arm and the support arm, and a controller configured to adjust an internal pressure of each of the first air bag and the second air bag. The controller may adjust a difference in internal pressure between the first air bag and the second air bag to control the inclination of the roll brush, and may adjust the internal pressure of each of the first air bag and the second air bag to move the roll brush vertically.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.