Inventor · Suwon-si, KR

Kuntack Lee

45Patents
4h-index
66Co-inventors
62Inventor score

Filing activity: May 12, 2008 → Dec 19, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US8076198B2 Method of fabricating nonvolatile memory device Electricity 193 Active
US9027576B2 Substrate treatment systems using supercritical fluid Electricity 7 Active
US8120089B2 Non-volatile memory device and method for fabricating non-volatile memory device Electricity 7 Active
US10361100B2 Apparatus and methods for treating a substrate Electricity 5 Active
US9595434B2 Apparatus and methods for manufacturing semiconductor devices and treating substrates Electricity 4 Active
US9534839B2 Apparatus and methods for treating a substrate Electricity 4 Active
US10155903B2 Metal etchant compositions and methods of fabricating a semiconductor device using the same Electricity 2 Active
US9941110B2 Manufacturing method and fluid supply system for treating substrate Electricity 2 Active
US9831081B2 Method for treating substrate Electricity 2 Active
US8202369B2 Method and apparatus for controlled transient cavitation Emerging Cross-Sectional Technologies 2 Active
US9627233B2 Substrate treating apparatus Electricity 2 Active
US9153597B2 Methods of manufacturing a three-dimensional semiconductor device Electricity 2 Active
US10825698B2 Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate Electricity 2 Active
US9524864B2 Manufacturing method and fluid supply system for treating substrate Electricity 2 Active
US10991600B2 Process chamber and substrate processing apparatus including the same Electricity 1 Active
US9852921B2 Substrate treating apparatus and method of treating substrate Electricity 1 Active
US7968454B2 Method of forming pattern structure Electricity 1 Active
US9721801B2 Apparatus and a method for treating a substrate Electricity 0 Active
US11342203B2 Substrate cleaning apparatus and substrate cleaning method using the same Electricity 0 Active
US11654458B2 Substrate-cleaning apparatus having tiltable roll brush Performing Operations; Transporting 0 Active
US11881426B2 Substrate transferring unit, substrate processing apparatus, and substrate processing method Physics 0 Active
US11482410B2 Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid Electricity 0 Active
US10186427B2 Substrate treating apparatus Electricity 0 Active
US11646203B2 Thin film formation apparatus and method using plasma Electricity 0 Active
US12216408B2 Apparatus for drying wafer and method for drying wafer Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.