Extended cathode and repeller life by active management of halogen cycle
US11664183B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 5, 2021 |
| Grant date | May 30, 2023 |
| Priority date | — |
| Expiry date | Jan 18, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3023
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A system and method for extending the life of a cathode and repeller in an IHC ion source is disclosed. The system monitors the health of the cathode by operating using a known set of parameters and measuring the bias power used to generate the desired extracted beam current or the desired current from the arc voltage power supply. Based on the measured bias power, the system may determine whether the cathode is becoming too thin, and may take a corrective action. This corrective action may be to alert the operator; to operate the IHC ion source using a predetermined set of parameters; or to change the dilution used within the IHC source. By performing these actions, the life of the cathode may be more than doubled.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.