Patent · US Active

Solid state heater and method of manufacture

US11665786B2 · kind B2 · utility

0Cited by

8References

15Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

David Morrell · Wakefield, US
Dawei Sun · Suqian, CN

Key dates

Filing date	Dec 5, 2019
Grant date	May 30, 2023
Priority date	—
Expiry date	Feb 23, 2042

Classification

Technology area (CPC H)Electricity
CPC primaryH05B2203/017
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

A solid state heater and methods of manufacturing the heater is disclosed. The heater comprises a unitary component that includes portions that are graphite and other portions that are silicon carbide. Current is conducted through the graphite portion of the unitary structure between two or more terminals. The silicon carbide does not conduct electricity, but is effective at conducting the heat throughout the unitary component. In certain embodiments, chemical vapor conversion (CVC) is used to create the solid state heater. If desired, a coating may be applied to the unitary component to protect it from a harsh environment.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.