Patent · US Active

Modular linear accelerator assembly

US11665810B2 · kind B2 · utility

0Cited by

5References

14Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Frank Sinclair · Quincy, US
Paul J. Murphy · Reading, US
Michael Honan · Peabody, US
Charles T. Carlson · Cedar Park, US

Key dates

Filing date	Dec 4, 2020
Grant date	May 30, 2023
Priority date	—
Expiry date	Aug 20, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/04735
WIPO fieldChemical engineering
WIPO sectorChemistry

Abstract

Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, the linear accelerator assembly may include a central support within a chamber, and a plurality of modules coupled to the central support, at least one module of the plurality of modules including an electrode having an aperture for receiving and delivering an ion beam along a beamline axis.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.