Method for controlling a manufacturing apparatus and associated apparatuses
US11669017B2 · kind B2 · utility
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2References
20Claims
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Key dates
| Filing date | Nov 9, 2018 |
| Grant date | Jun 6, 2023 |
| Priority date | — |
| Expiry date | Nov 9, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70616
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for determining a plurality of corrections for control of at least one manufacturing apparatus used in a manufacturing process for providing product structures to a substrate in a plurality of layers, the method including: determining the plurality of corrections including a correction for each layer, based on an actuation potential of the applicable manufacturing apparatus used in the formation of each layer, wherein the determining includes determining corrections for each layer simultaneously in terms of a matching parameter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.