Manufacturing method for an artificially oriented piezoelectric film for integrated filters
US11671066B2 · kind B2 · utility
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Key dates
| Filing date | Oct 2, 2019 |
| Grant date | Jun 6, 2023 |
| Priority date | — |
| Expiry date | Sep 20, 2040 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/42
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An artificially oriented piezoelectric films for integrated filters and methods of manufacture. The method includes: forming a piezoelectric film with effective crystalline orientations of a polar axis rotated 90 degrees from a natural orientation for planar deposited piezoelectric films; and forming electrodes on a planar surface of the piezoelectric film. The piezoelectric film has an effective crystalline orientation of the polar axis in a horizontal orientation, with respect to the electrodes, and an effective crystalline orientation of the polar axis in a vertical direction adjacent to an underlying substrate.
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