Light transmitting member, polishing pad, and substrate polishing apparatus
US11673224B2 · kind B2 · utility
0Cited by
11References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 7, 2019 |
| Grant date | Jun 13, 2023 |
| Priority date | — |
| Expiry date | May 27, 2040 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24B37/013
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Disclosed is a light transmitting member for a polishing pad. The light transmitting member has a cylindrical or truncated conical shape, and a screw thread is formed on a side portion thereof. A polishing pad includes such a light transmitting member and a substrate polishing apparatus includes such a polishing pad.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.