Stepped substrate coating composition containing compound having curable functional group
US11674051B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 12, 2018 |
| Grant date | Jun 13, 2023 |
| Priority date | — |
| Expiry date | Dec 23, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/0332
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A stepped substrate coating composition for forming a coating film having planarity on a substrate, including: a main agent and a solvent, the main agent containing a compound (A), a compound (B), or a mixture thereof, the compound (A) having a partial structure Formula (A-1) or (A-2): and the compound (B) having at least one partial structure selected from Formulae (B-1)-(B-5), or having a partial structure including a combination of a partial structure of Formula (B-6) and a partial structure of Formula (B-7) or (B-8): where the composition is cured by photoirradiation or by heating at 30° C.-300° C.; and the amount of the main agent in the solid content of the composition is 95%-100% by mass.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.