Reactor for coating particles in stationary chamber with rotating paddles and gas injection

US11674223B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Jonathan Frankel · Los Gatos, US
• Colin C. Neikirk · Mountain View, US
• Pravin K. Narwankar · Sunnyvale, US
• Quoc Truong · San Ramon, US
• Govindraj Desai · Kanchinakote, IN
• Sekar Krishnasamy · Kanchinakote, IN
• Shrikant Swaminathan · Santa Clara, US

Key dates

• Filing date: Apr 22, 2020
• Grant date: Jun 13, 2023
• Expiry date: Apr 22, 2040

Classification

• Technology area (CPC A): Human Necessities
• CPC primary: A61K9/5089
• WIPO field: Pharmaceuticals
• WIPO sector: Chemistry

Abstract

A reactor for coating particles includes a stationary vacuum chamber having a lower portion that forms a half-cylinder and an upper portion to hold a bed of particles to be coated, a vacuum port in the upper portion of the chamber, a paddle assembly, a motor to rotate a drive shaft of the paddle assembly, a chemical delivery system to deliver a first fluid, and a first gas injection assembly to receive the first fluid from the chemical delivery system and having apertures configured to inject a first reactant or precursor gas into the lower portion of the chamber and such that the first reactant or precursor gas flows substantially tangent to a curved inner surface of the half-cylinder.