Patent · US Active

Terahertz plasmonics for testing very large-scale integrated circuits under bias

US11675002B2 · kind B2 · utility

1Cited by
0References
18Claims
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Assignee

Inventors

Key dates

Filing dateDec 15, 2020
Grant dateJun 13, 2023
Priority date
Expiry dateDec 15, 2040

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/318533
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Various embodiments are described that relate to failure determination for an integrated circuit. An integrated circuit can be tested to determine if the integrated circuit is functioning properly. The integrated circuit can be subjected to a specific radiation such that the integrated circuit produces a response. This response can be compared against an expected response to determine if the response matches the expected response. If the response does not match the expected response, then the integrated circuit fails the test. If the response matches the expected response, then the integrated circuit passes the test.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.