Reflective optical element, beam guiding device and EUV-beam generating device
US11675202B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 22, 2020 |
| Grant date | Jun 13, 2023 |
| Priority date | — |
| Expiry date | Feb 3, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/0086
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A reflective optical element includes a first, inner surface region for reflecting a first inner beam portion of a light beam impinging on the reflective optical element in order to form a first reflected light beam, and at least one second, outer surface region for reflecting at least one second outer beam portion of the impinging light beam for forming at least one second reflected light beam. The second surface region is designed to reduce a beam cross section of the second reflected light beam by comparison to the first reflected light beam such that the second reflected light beam extends along a superposition length completely within the first reflected light beam. In addition a beam guiding device has at least one such reflective optical element and an EUV-beam generating device has such a beam guiding device.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.