Patent · US Active

Microelectromechanical device with stopper

US11685644B2 · kind B2 · utility

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0References

2Claims

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Assignee

MURATA MANUFACTURING CO., LTD. · JP

Inventors

Marko Peussa · Espoo, FI
Pasi Kivinen · Kirkkonummi, FI

Key dates

Filing date	Dec 17, 2020
Grant date	Jun 27, 2023
Priority date	—
Expiry date	Dec 17, 2040

Classification

Technology area (CPC G)Physics
CPC primaryG01P2015/0871
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

This disclosure describes a microelectromechanical device comprising at least one mobile rotor. The rotor comprises a rotor measurement region and a rotor stopper region and a rotor isolation region which connects the rotor measurement region mechanically to the rotor stopper region and isolates the rotor measurement region electrically from the rotor stopper region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.