Marko Peussa
5Patents
3h-index
8Co-inventors
46Inventor score
Filing activity: Jan 17, 2006 → Dec 17, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8211230B2 | Reaction system for growing a thin film | Electricity | 26 | Active |
| US9359672B2 | Reaction system for growing a thin film | Electricity | 12 | Active |
| US10468291B2 | Reaction system for growing a thin film | Electricity | 10 | Active |
| US11685644B2 | Microelectromechanical device with stopper | Physics | 0 | Active |
| US11603312B2 | MEMS element with increased density | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.