Patent · US Active

Textured processing chamber components and methods of manufacturing same

US11685990B2 · kind B2 · utility

0Cited by

3References

18Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Cariappa Baduvamanda · Bengaluru, IN
Ong Pang Yen · Singapore, SG
Lit Ping LAM · Singapore, SG

Key dates

Filing date	Dec 8, 2017
Grant date	Jun 27, 2023
Priority date	—
Expiry date	Oct 12, 2038

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY02P10/25
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Processing chamber components and methods of manufacture of same are provided herein. In some embodiments, a component part body includes a component part body having a base plane and at least one textured surface region, wherein the at least one textured surface region comprises a plurality of independent surface features having a first side having at least a 45 degree angle with respect to the base plane. In at least some embodiments, the textured surface includes a plurality of independent surface features which are pore free.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.