Encapsulated cleanroom system
US11686479B2 · kind B2 · utility
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4References
7Claims
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Assignee
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Key dates
| Filing date | Mar 23, 2021 |
| Grant date | Jun 27, 2023 |
| Priority date | — |
| Expiry date | Sep 8, 2041 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF24F2110/40
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
An encapsulated cleanroom system comprising a processing chamber and a storage section in which the processing chamber is stored, wherein, during operation, the pressure in the storage section is lower or higher than the pressures in the processing chamber and exterior space. The system can simultaneously prevent the entry of outside gases into its processing chamber and the leakage of the gases inside the processing chamber to the exterior space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.