Patent · US Active

Method and apparatus for continuous substrate cassette loading

US11688618B2 · kind B2 · utility

0Cited by

7References

19Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Asaf Schlezinger · Sunnyvale, US
Markus J. Stopper · Hergolding, DE

Key dates

Filing date	Dec 10, 2020
Grant date	Jun 27, 2023
Priority date	—
Expiry date	May 11, 2041

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/6838
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method and apparatus for loading substrates in an inspection station is disclosed herein. In one embodiment a loading module is disclosed that includes a loading station for two or more substrate cassettes, a first lane comprising a first conveyor that is substantially aligned with one of the two or more substrate cassettes and a conveyor system, a second lane comprising a second conveyor that is substantially aligned with another of the two or more substrate cassettes and positioned in a spaced-apart relation relative to the first lane, and a lateral transfer module positioned between the first lane and the second lane that is adapted to move substrates from the second lane to the first lane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.