Batch processing oven and operating methods
US11688621B2 · kind B2 · utility
0Cited by
22References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 31, 2021 |
| Grant date | Jun 27, 2023 |
| Priority date | — |
| Expiry date | Oct 12, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67757
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A batch processing oven comprising a processing chamber and a rack configured to be positioned in the processing chamber. The rack is configured to support a plurality of substrates and a plurality of panels in a stacked manner such that one or more substrates of the plurality of substrates are positioned between at least one pair of adjacent panels of the plurality panels. Vertical gaps separate each substrate of the one or more substrates from an adjacent substrate or panel on either side of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.