Patent assignee · US · COMPANY

Yield Engineering Systems, Inc.

29Patents
25Active
29Granted
63Portfolio score

Filing activity: May 3, 1985 → Dec 6, 2024 · 2 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US4597736A Method and apparatus for heating semiconductor wafers Mechanical Engineering; Lighting; Heating 18 Expired
US6198075A Rapid heating and cooling vacuum oven Chemistry; Metallurgy 7 Expired
US8361548B2 Method for efficient coating of substrates including plasma cleaning and dehydration Performing Operations; Transporting 7 Active
US10490431B2 Combination vacuum and over-pressure process chamber and methods related thereto Mechanical Engineering; Lighting; Heating 4 Active
US6267075A Apparatus for cleaning items using gas plasma Electricity 3 Expired
US11335662B2 Solder reflow oven for batch processing Electricity 3 Active
US11456274B1 Method of using a processing oven Electricity 2 Active
US8252375B2 Apparatus for the efficient coating of substrates including plasma cleaning Performing Operations; Transporting 2 Active
US11296049B1 Processing oven Electricity 2 Active
US11465225B1 Method of using processing oven Electricity 2 Active
US10147617B2 Method for the rapid processing of polymer layers in support of imidization processes and fan out wafer level packaging including efficient drying of precursor layers Performing Operations; Transporting 1 Active
US11850672B2 Method of using processing oven Electricity 1 Active
US11444053B2 Batch processing oven and method Electricity 1 Active
US12387946B2 Double-sided scrubber for substrate cleaning Performing Operations; Transporting 0 Active
US11818849B1 Increasing adhesion of metal-organic interfaces by silane vapor treatment Emerging Cross-Sectional Technologies 0 Active
US12138745B2 Apparatus and method for coating removal Performing Operations; Transporting 0 Active
US12042827B1 Integrated ultrasonics and megasonics cleaning Performing Operations; Transporting 0 Active
US10319612B2 Method for the rapid processing of polymer layers in support of imidization processes and fan out wafer level packaging including effiecient drying of precursor layers Performing Operations; Transporting 0 Active
US11367640B2 Combination vacuum and over-pressure process chamber and methods related thereto Mechanical Engineering; Lighting; Heating 0 Active
US12398877B1 Fluid vaporizers Mechanical Engineering; Lighting; Heating 0 Active
US12330268B2 Apparatus for coating removal Performing Operations; Transporting 0 Active
USRE49802E1 Method for the rapid processing of polymer layers in support of imidization processes and fan out wafer level packaging including efficient drying of precursor layers General 0 Active
US10840068B2 Plasma spreading apparatus and method of spreading plasma in process ovens Electricity 0 Active
US12330228B2 Method of using processing oven Electricity 0 Active
US11688621B2 Batch processing oven and operating methods Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.