Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor

US11693021B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Somu Goswami · Munich, DE
• Christian Bretthauer · Munich, DE
• Matthias Herrmann · Hildesheim, DE
• Gunar Lorenz · Voisins-le-Bretonneux, FR
• Pradyumna Mishra · San Jose, US
• Daniel Neumaier · Feldkirchen in Kärnten, AT
• David Tumpold · Tauberbischofsheim, DE

Key dates

• Filing date: Jun 22, 2021
• Grant date: Jul 4, 2023
• Expiry date: Sep 1, 2041

Classification

• Technology area (CPC H): Electricity
• CPC primary: H04R2410/03
• WIPO field: Audio-visual technology
• WIPO sector: Electrical engineering

Abstract

A MEMS vibration sensor includes a piezoelectric membrane including a segmented electrode affixed to a holder; and an inertial mass affixed to the piezoelectric membrane, wherein the segmented electrode includes four segmentation zones, wherein, in an X-direction, a signal from a first segmentation zone is equal to a signal from a third segmentation zone, a signal from a second segmentation zone is equal to a signal from a fourth segmentation zone, and the signal from the first segmentation zone and the signal from the second segmentation zone have opposite signs, and wherein, in a Y-direction, a signal from the first segmentation zone is equal to the signal from the second segmentation zone, the signal from the third segmentation zone is equal to the signal from the fourth segmentation zone, and the signal from first segmentation zone and the signal from the third segmentation zone have opposite signs.