Patent · US Active

Closure element for closing a loading opening of an inner housing of a CVD reactor

US11702740B2 · kind B2 · utility

2Cited by

1References

9Claims

0Family size

Assignee

AIXTRON SE · DE

Inventors

Marcel KOLLBERG · Würselen, DE
Francisco Ruda Y Witt · Eschweiler, DE
Mike Pfisterer · Würselen, DE

Key dates

Filing date	Oct 2, 2018
Grant date	Jul 18, 2023
Priority date	—
Expiry date	Oct 13, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/6719
WIPO fieldMechanical elements
WIPO sectorMechanical engineering

Abstract

A CVD reactor includes a gas-tight and evacuatable reactor housing and an inner housing arranged therein. The inner housing has means for the infeed of a process gas and means for holding a substrate for treatment in the inner housing by means of the process gases. The inner housing also has a loading opening which can be closed off by a sealing element of a closure element. In its closure position, the closure element bears with an encircling sealing zone against a counterpart sealing zone which encircles the loading opening on the outer side of the inner housing. The sealing element is fastened to a carrier as to be adjustable in terms of inclination and/or pivotally movable about at least one spatial axis (X, Y, Z) and/or so as to be elastically deflectable in the direction of one of the spatial axes (X, Y, Z).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.