Method and apparatus for measuring transmittance of quartz crucible
US11703452B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 15, 2019 |
| Grant date | Jul 18, 2023 |
| Priority date | — |
| Expiry date | Jul 22, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/4707
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A measurement method and a measurement apparatus are capable of measuring the transmittance of a quartz crucible accurately. A measurement method includes: emitting a parallel light from a light source disposed on a side of one wall surface of a quartz crucible toward a predetermined measurement point of the quartz crucible; measuring reception levels of light transmitted through the quartz crucible at a plurality of positions by disposing a detector at the plurality of positions on a circle centered around an exit point of the parallel light on the other wall surface of the quartz crucible; and calculating a transmittance of the quartz crucible at the predetermined measurement point based on a plurality of the reception levels of the transmitted light measured at the plurality of positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.