Patent · US Active

Method and apparatus for measuring transmittance of quartz crucible

US11703452B2 · kind B2 · utility

0Cited by
0References
22Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 15, 2019
Grant dateJul 18, 2023
Priority date
Expiry dateJul 22, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2021/4707
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A measurement method and a measurement apparatus are capable of measuring the transmittance of a quartz crucible accurately. A measurement method includes: emitting a parallel light from a light source disposed on a side of one wall surface of a quartz crucible toward a predetermined measurement point of the quartz crucible; measuring reception levels of light transmitted through the quartz crucible at a plurality of positions by disposing a detector at the plurality of positions on a circle centered around an exit point of the parallel light on the other wall surface of the quartz crucible; and calculating a transmittance of the quartz crucible at the predetermined measurement point based on a plurality of the reception levels of the transmitted light measured at the plurality of positions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.