SUMCO CORPORATION
595Patents
544Active
595Granted
61Portfolio score
Filing activity: Jul 12, 2001 → Feb 16, 2024 · 196 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7833348B2 | Temperature control method of epitaxial growth apparatus | Chemistry; Metallurgy | 403 | Active |
| US8063466B2 | Semiconductor substrate for solid-state image sensing device as well as solid-state image sensing device and method for producing the same | Emerging Cross-Sectional Technologies | 96 | Active |
| US7491342B2 | Bonded semiconductor substrate manufacturing method thereof | Electricity | 31 | Expired |
| US7781309B2 | Method for manufacturing direct bonded SOI wafer and direct bonded SOI wafer manufactured by the method | Electricity | 25 | Active |
| US7718509B2 | Method for producing bonded wafer | Electricity | 24 | Active |
| US7943497B2 | Method for manufacturing an SOI substrate | Emerging Cross-Sectional Technologies | 22 | Active |
| US7354844B2 | Method for manufacturing SOI substrate | Electricity | 21 | Active |
| US7713842B2 | Method for producing bonded wafer | Electricity | 20 | Active |
| US7331780B2 | Heat treatment jig for semiconductor wafer | Electricity | 18 | Expired |
| US7811907B2 | Method for manufacturing semiconductor device and epitaxial growth equipment | Electricity | 14 | Active |
| US7700394B2 | Method for manufacturing silicon wafer method | Electricity | 12 | Expired |
| US7712290B2 | Container packaging apparatus | Performing Operations; Transporting | 11 | Active |
| US7320731B2 | Process for growing silicon single crystal and process for producing silicon wafer | Chemistry; Metallurgy | 11 | Active |
| US7642178B2 | Semiconductor device, method for manufacturing the same and method for evaluating the same | Electricity | 10 | Active |
| US9017483B2 | Susceptor for vapor phase epitaxial growth device | Chemistry; Metallurgy | 10 | Active |
| US7763541B2 | Process for regenerating layer transferred wafer | Electricity | 10 | Active |
| US7442623B2 | Method for manufacturing bonded substrate and bonded substrate manufactured by the method | Electricity | 10 | Active |
| US9133063B2 | Composite crucible, method of manufacturing the same, and method of manufacturing silicon crystal | Emerging Cross-Sectional Technologies | 8 | Active |
| US7960254B2 | Manufacturing method for epitaxial wafer | Electricity | 8 | Active |
| US7736998B2 | Silicon-on insulator substrate and method for manufacturing the same | Emerging Cross-Sectional Technologies | 8 | Active |
| US7316745B2 | High-resistance silicon wafer and process for producing the same | Emerging Cross-Sectional Technologies | 8 | Expired |
| US8110486B2 | Method of manufacturing semiconductor wafer by forming a strain relaxation SiGe layer on an insulating layer of SOI wafer | Electricity | 8 | Active |
| US7290382B2 | Container packaging apparatus | Performing Operations; Transporting | 8 | Active |
| US7719260B2 | Method for pre-treating epitaxial layer, method for evaluating epitaxial layer, and apparatus for evaluating epitaxial layer | Electricity | 8 | Active |
| US7405142B2 | Semiconductor substrate and field-effect transistor, and manufacturing method for same | Electricity | 7 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.