Compensation of creep effects in an imaging device

US11703770B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Eylem Bektas Knauf · Aalen, DE
• Ulrich Schoenhoff · Ulm, DE
• Marwene Nefzi · Ulm, DE
• Ralf Zweering · Aalen, DE
• Konrad Carl Steimer · Mannheim, DE
• Yim-Bun Patrick Kwan · Aalen, DE

Key dates

• Filing date: Jun 22, 2021
• Grant date: Jul 18, 2023
• Expiry date: Jun 22, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/7085
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An arrangement of a microlithographic optical imaging device includes first and supporting structures. The first supporting structure supports an optical element of the imaging device. The first supporting structure supports the second supporting structure via supporting spring devices of a vibration decoupling device. The supporting spring devices act kinematically parallel to one another between the first and second supporting structures. Each supporting spring device defines a supporting force direction and a supporting length along the supporting force direction. The second supporting structure supports a measuring device configured to measure the position and/or orientation of the optical element in relation to a reference in at least one degree of freedom and up to all six degrees of freedom in space. A creep compensation device compensates a change in a static relative situation between the first and second supporting structures in at least one correction degree of freedom.