Flow rate estimation for mass flow controller
US11709080B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 4, 2020 |
| Grant date | Jul 25, 2023 |
| Priority date | — |
| Expiry date | Aug 14, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06N3/084
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mass flow controller, including a block body having a flow path and a valve provided at least in part within the flow path. The mass flow controller may further include a valve position sensor, a first temperature sensor, a first pressure sensor located on an upstream side of the flow path from the valve, and a second pressure sensor located on a downstream side of the flow path from the valve. The mass flow controller may further include a processor configured to receive valve position data, first temperature data, first pressure data, and second pressure data. The processor may be further configured to estimate a flow rate of fluid in the flow path at least in part by applying a trained machine learning model to the valve position data, the first temperature data, the first pressure data, and the second pressure data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.