Patent · US Active

AFM imaging with creep correction

US11714104B2 · kind B2 · utility

0Cited by

3References

16Claims

0Family size

Assignee

Bruker Nano, Inc. · US

Inventors

Jason Osborne · Lompoc, US
Sean Hand · Midland School, US
Vladimir Fonoberov · Goleta, US
James Young · Goleta, US

Key dates

Filing date	May 25, 2021
Grant date	Aug 1, 2023
Priority date	—
Expiry date	May 25, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG01Q60/38
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An atomic force microscope (AFM) and method of operating the same includes a separate Z height sensor to measure, simultaneously with AFM system control, probe sample distance, pixel-by-pixel during AFM data acquisition. By mapping the AFM data to low resolution data of the Z height data, a high resolution final data image corrected for creep is generated in real time.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.