Reactor for coating particles in stationary chamber with rotating paddles

US11717800B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Jonathan Frankel · Los Gatos, US
• Colin C. Neikirk · Mountain View, US
• Pravin K. Narwankar · Sunnyvale, US
• Quoc Truong · San Ramon, US
• Govindraj Desai · Kanchinakote, IN
• Sekar Krishnasamy · Kanchinakote, IN

Key dates

• Filing date: Apr 22, 2020
• Grant date: Aug 8, 2023
• Expiry date: Oct 1, 2040

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B05D2258/00
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A reactor for coating particles includes a stationary vacuum chamber to hold a bed of particles to be coated, a vacuum port in an upper portion of the chamber, a chemical delivery system configured to inject a reactant or precursor gas into a lower portion of the chamber, a paddle assembly, and a motor to rotate a drive shaft of the paddle assembly. The lower portion of the chamber forms a half-cylinder. The paddle assembly includes a rotatable drive shaft extending through the chamber along the axial axis of the half cylinder, and a plurality of paddles extending radially from the drive shaft such that rotation of the drive shaft by the motor orbits the plurality of paddles about the drive shaft.